Qhov sib txawv thiab cov ntawv thov ntawm txheej PVD thiab CVD
PVD (lub cev vapor deposition) thiab CVD (tshuaj vapor deposition) yog ob lub txheej txheej txheej txheem thev naus laus zis uas txawv rau hauv cov txheej txheem, txheej txheem thiab daim ntawv thov.
1. Ntsiab ntawm cov ntsiab lus PVD: hloov cov khoom siv los ntawm cov khoom siv rau cov roj (xws li tso tawm rau saum npoo ntawm substrate los ua zaj duab xis nyias. CVD: Tsim kom muaj zaj duab xis ruaj khov nyob rau saum npoo ntawm substrate los ntawm cov tshuaj tiv thaiv tshuaj lom neeg, feem ntau muaj feem xyuam nrog cov kev ua txhaum lossis cov tshuaj tiv thaiv ua ntej ntawm qhov kub.
2. Process conditions PVD: Usually carried out in a vacuum environment, the temperature is relatively low (200-500 degree ), suitable for materials that are not resistant to high temperatures. CVD: Yuav tsum muaj qhov kub ({600-1000 degree), feem ntau nqa tawm ntawm lub siab qub lossis tsis tshua muaj siab, haum rau cov khoom kub siab.
3. Cov yeeb yaj kiab nyias nyias PVD: zaj duab xis yog ntom thiab muaj cov nplaum muaj zog, tab sis cov kev sib dhos thickness yog tsis zoo. CVD: Cov yeeb yaj kiab muaj cov kev sib txuam zoo thiab tuaj yeem npog cov duab zoo, tab sis yuav muaj impurities.
4. Daim ntawv thov teb PVD: feem ntau siv nyob rau hauv cov cuab yeej txheej (xws li txiav cov cuab yeej), xws li watches, hniav nyiaj hniav kub) thiab xws li lo ntsiab muag). CVD: Siv dav hauv cov semiconductors (xws li sib xyaw ua ke), xws li pwm) thiab kub tiv thaiv kub (xws li lub dav hlau cav tuaj).
5. Qhov zoo thiab qhov tsis zoo PVD: Cov kev ua haujlwm suav nrog kev ua haujlwm tsawg thiab muaj zaj duab xis siab; Qhov tsis zoo yog cov cuab yeej siv cov cuab yeej siab thiab tus nqi tso nyiaj qis. CVD: Cov kev ua kom zoo xws li zaj duab xis uniform thiab haum rau cov duab nyuaj; Qhov tsis zoo yog qhov ntsuas kub thiab txias tau thiab ua tau ntau tiam ntawm kev phom sij.
Ntsiab lus PVD thiab CVD muaj lawv tus yam ntxwv, thiab kev xaiv yog nyob ntawm cov kev tseev kom muaj. PVD yog haum rau cov yeeb yaj kiab tsawg thiab muaj cov yeeb yaj kiab zoo, thaum CVD yog haum rau kev kub thiab cov txheej txheem qub ntawm cov duab nyuaj.
